d be metal, polymer, and even ceramics.?Vertical and better surface roughness in sidewall ?Vertical slope<1μm/mm, ?Surface roughness 0.03-0.05 μm(max. peak to valley)?It can be applied in both MEMS and traditional precision manufacturing.Р5Р精选pptРРРLIGA Process—X-ray lithographyР6Р精选pptРРРLIGA Process—ElectroplatingР7Р精选pptРРРLIGA Process—MoldingР8Р精选pptРРРLIGA MaterialsРPolymers?Used in X-ray lithography period. The materials must be able to allow photochemical reaction under exposure under X-ray?Thick PMMA is a popular choice?Metals?Used in electrodeposition phase to form a mould?Nickel is a popular choice.?Polymer again?Used in molding period?The final LIGA product is usually made of polymersР9Р精选pptРРРLIGA ApplicationsРhigh aspect ratio microstructuresРMicro turbine rotor, KfKР10Р精选ppt
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