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MEMS微系统技术(北理内部讲义)

上传者:苏堤漫步 |  格式:ppt  |  页数:80 |  大小:9975KB

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a multi-plex system of the three-dimensional structure of a highly centralized in optical and electrical machinery,by the contray,integrated circuits and processing technology is a two-dimensional surface or shallow, but the main thing is processing silicon .?Therefore, the entire manufacturing process of Microsistem,such as chip processing, integrated assembly, packaging and testing of integrated circuits, is much plicated than the manufacturing process of integrate circuit.Р9/18/2018Р10Р微系统技术的发展已经使许多高速信息处理、大容量存储、超低功耗的电子产品成为现实,未来的微系统产品将覆盖人类生活的方方面面。? The development of Micro-system technology has many electronic products e a reality,such as high-speed information processing, large capacity storage, ultra-low power , the future of micro-system products will cover all aspects of human life.

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