elements that allow it to perform minute plicated tasks.[微机器是一种极其小的机器,它由非常小(数微米或更小)但是具有高度复杂功能的部件构成,能够完成灵巧和复杂的任务。Р微机器 Micro machine (Japan)?echanical System (USA)?微系统 Micro System (Europe)Р2017/12/22Р第一讲 MEMS/NMES概论Р9РMEMS组成Р1.4 MEMS涉及的主要领域Р2017/12/22Р第一讲 MEMS/NMES概论Р10РA way of making things?Leveraging on existing infrastructure of IC fabrication tools?Prototype on the exact mass-production fabrication tools?Co-location of sense, compute, actuate, control, communicate, power?Increase performance and decrease cost?Integrate an increased number of fabrication technologies?Closed-loop, microscale control of electrical, thermal, fluid, ic, optical, and mass flux?MEMS is a surface technology?Control phenomena on the microscale?Cause large effects both on macroscale and microscaleРWhat Are MEMS?
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