eswitchstress.Su- inIEEEElectronDeviceLetters,vol.41,no.5,pp.РperlatticesandMicrostructures,116,151-163 749-752,May2020Р[15]DengS,HossainZ,TaniguchiT.DetailedStudyon [20]Chen,X.,Feng,Q.,&Jin,T.600-VshieldedtrenchРDynamicCharacteristicsofaHigh-PerformanceSGT- split-gateVDMOSimprovingthefigureofmerit.Inter-РMOSFETWithUnder-the-TrenchFloatingP-Pillar[J]. nationalJournalofElectronics,2019:1-15РIEEETransactionsonElectronDevices,2017,64(3):Р735-740 作者简介Р[16]Chien,F.-T.;Wang,Z.-Z.;Lin,C.-L.;Kang,T.-K.; 陈利,厦门海洋职业技术学院,研 究 方 向 :集 成电路РChen,C.-W.;Chiu,H.-C.150-200VSplit-Gate 应用。РРР 2021 4Рhttp://www.cicmag.com ··(总第 263 期) 57