技术的构成微系统微器件传感器、执行器等微制造材料—设计—工艺—测试—封装应用技术指标设计???材料、原理、工艺What are MEMS??Micro - Small size, microfabricated structures?Electro - Electrical signal /control ( In / Out )?Mechanical - Mechanical functionality ( In / Out )?Systems - Structures, Devices, Systems - Control各个国家不同的定义?美国:微型机电系统?MEMS: Micro electro mechanical system?日本:微机械?Micro machine?欧洲:微系统?Micro system?(electrical(voltage, charge, current),mechanicl(force, pressure, velocity, acceleration, position),thermal(temperature, heat and heat flow),ic(field intensity, flux density, ization),fluidic,optical(intensity, wavelength, polarization, phase),chemical(concentration, pH, reaction rate) etc.)Multidisciplinary微型机电系统的特点?体积小、重量轻、耗能低、性能稳定;?有利于大批量生产,降低生产成本;?惯性小、谐振频率高、响应时间短;?集约高技术成果,附加价值高;?拥有广泛的应用领域和前景。
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