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金_硅共晶键合技术及其应用

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Physical 1997 62 1 /2 /3 680-686. 17 陈颖慧施志贵郑英彬等. 不同键合温度对低温硅-硅Р[ ] , , [] , , ( ) :Р 13 Jing Errong Xiong Bin Wang Yuelin. The bond strength of 共晶键合的影响 J . 微纳电子技术 2013 50 9 576-Р []Р Au /Si eutectic bonding studied by IR microscope J . IEEE 580.Р , , , , ,Р Transactions on Electronics Packaging Manufacturing 2010 Chen Yinghui Shi Zhigui Zheng Yingbin et al. Effects ofР ( ) :Р 33 1 31-37. different bonding temperatures on the low temperature Si-SiР[ ] , , [ ] ,Р 14 Jing Errong Xiong Bin Wang Yuelin. The interface of Au / eutectic bonding J . Micronanoelectronic TechnologyР [] , ( ) : ( )Р Si eutectic bonding studied by IR microscope J . Materials 2013 50 9 576-580 in Chinese .Р , , ( ) : ( : )Р Letters 2010 64 7 827-829. 责任编辑孙媛媛Р[ ] , ,Р 15 Jing Errong Xiong Bin Wang Yuelin. Low-temperature

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