pticalinterferometricread-outandintegratedelectrostaticactuation2008(01)14・GARCIACT;0N/\R/\NG;八VENSONBHicroacismomctcrsviaadvancedmeso-scalefabrication201015.KRISHN八MOORTHYU;0ISS0NRH;BOGARTInplancMEMS~bascdnao~elerometerwithsub-wavelengthopticalresonantsensor[外文期刊]200816.1丄OBER八八;pl」\Z八J八;SANI,1N/\elerometerbasedonentiresonantwaveguides[外文期刊]2004(01)17.PI,八处J八;I丄OBER八八;DOMINGl;ESCBESOIbascdintegratedoptica】lcromctc讥夕卜文期刊]2004(02)18.1丄OBER八八;VII丄ANl;EV八G;CAI)/\hanicalsystems:elerometers200719・1丄01引讪\八;SEIDI讪\NN?J八SU-】cromctcrs[外文期刊]2007(01)BH()I」\B;STE1ERWHANove】optica】lcromctc讥夕卜文期刊]2007(12)BH()I」\B;SONGHC;T/\ZAWAHPolymermicrorcsonatorstrainsensors[外文期刊]2005(04)BUTTSI)I,elerometer2008POSTER;POPESCUGA;GERSHENFEI」)NInertialmeasurementwithtrappedpatticlcs:amiicrodynamicalsystem[夕卜文期刊]2010(14)
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