1975 -1989 ? The first analytical miniaturized device A gas chromatographic air analyzer fabricated on a silicon wafer Terry, S. C. Ph.D. Thesis, Stanford, Stanford, CA, 1975 Terry, Stephen C.; et al. IEEE Transactions on Electron Devices, 1979, ED-26(12), 1880 ? A miniature gas anal. system based on the principles of gas chromatog . ? The major components are fabricated in Si using photolithog . and chem. etching techniques, which allows size redns . of nearly 3 orders of magnitude compared to conventional laboratory instruments. ? consists of a sample injection valve, a 1.5-m-long capillary column. A thermal conductivity detector fabricated on a separate silicon wafer . ? sepns . of gaseous hydrocarbon mixts . are performed in <10 s . 发展历史
全文预览
