ge chamber runningis calculated and analyzedwith the use of finite element simulation technology. We find out deformation of the internal electrodes of laser discharge chamber will be generated due tooversize of assembly gapbetween the componentsinsidethedischarge chamber, the poor accuracy of assembly, nonstandard of assembly process, and nonuniform of thetemperature distribution, which will affect thelaser gasionizationand lead unnecessary power loss.To solve these problems weproposesto four modified assembly of the laser discharge chamber, then analyses temperature distribution and thermal deformationof four programs. It made parison of five numerical simulation results, the scheme IIwas picked up to carry out final experiment. 万方数据
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