ine inX axis. Fig. 6B shows the calibration line inY axis . **大学 2011 届英文文献原文及翻译第 9页共 17页 Fig. 6A Measurement results ofX axis Fig. 6B Measurement results ofY axis V. CONLUSION A novel optical sensor was invented. A prototype has been built up and evaluated. Accuracy of +-1 arc second within the measurement range of700 arc seconds has been achieved. It can measure inclination angle or tilt angle of two axes simultaneously and precisely. This sensor is based on the principle of laser interference. It has the following main pare with other inclinometers. (1) High accurate. It is optical interference principle based sensor. Any variation less than2?, e.g.0.3 micron in optical path will cause the movement of interference fringe pattern. This tiny change is detected and converted to tilt angle.
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