2000, 22 (4 ): 34 36. Preparationofhighqual itydiamondf ilmsonWC -Cosubstrates MAZhi bin 1, 2, WANGJ ian hua 1, WUQing chong 2, WANGChuan xin 1 (1.DepartmentofMaterialScienceandEngineering ,WuhanInst ituteofChemicalTechnology , Wuhan 430073,China ; 2.TheInst ituteofPlasmaPhysics ,Hefei 230031,China ) Abstract :Diamondfilm swerep reparedonWC -Cosubst ratesw ithm icrowavep lasmachem icalvapor deposit ion .Theeffect sofdifferentp ret reatment sincludingacidetchingandcopperinterlayerandde2 posit ioncondit ionsonthequalityofdiamondfilm swerestudied .Theresultofthisstudyshow sthat thequalityofdiamondfilmisgoodw ithmoderatecondit ionsofgasp ressure 6. 0kPaandsubst rate temperature 780℃. Keywords :diamondfilm s ;tungstencarbide ;qualityoffilm 本文编辑:龚晓宁 94 第 2期 姜其斌等:聚醚氨酯环氧树脂同时互穿网络的研究(ê )
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