MEMS NEMS V4

crometer up to tens of micrometers, depending upon the fabrication technique employed.РIntroductionРMEMS/NEMS DevicesРThey have played key roles in many important areas?transportation, ?communication, ?automated manufacturing(制造), ?environmental monitoring, ?health care, ?defense systems, ?and a wide range of consumer products.РIntroductionРMEMs/NEMsРIntroduction?Materials? Silicon? Metel? Future?Fabrication?ApplicationsРMaterialsРExamples of materials for MEMS and NEMSРSemiconductors?pounds:?Si?SiO2?SixNy?Ge?GaAsРMetals ?pounds:?Au ?Al?NiFeРPolymers:?Polyimide?paryleneРMaterialsРExamples of materials for MEMS and NEMSРSilicon, SiРSilicon dioxide, SiO2РSilicon Nitride, SixNyРGermanium, GeРGaAsРMaterialsРExamples of materials for MEMS and NEMSРNickel Iron, NiFeРPolyimide 聚酰亚胺РParylene 聚对二甲苯